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Proceedings Paper

uEDM-produced mechanical grippers for handling and assembly in microtechnology
Author(s): Dragan Petrovic; Gordana Popovic; Elias Chatzitheodoridis; Oscar Del Medico; Ana Almansa; Franz Suemecz; Peter Herbst; Werner Brenner; Helmut Detter; Roland Duffait
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Paper Abstract

Two mechanical gripper types have been designed. Using a technology selection method, EDM was selected as the most appropriate fabrication technology for the designed grippers. Prototypes have been fabricated by wire EDM on a conventional machine. Increased attention has been paid to methodology of the production process and exploration of (mu) -EDM possibilities. The tolerance obtained is about 1 micrometers . The accuracy of the machined product is mainly determined by the quality of the electrode, its handling and the adjustment procedures. After fabrication the grippers were integrated onto a station for handling and assembly of microstructures. This paper provides a description of the used methodology in the production sequence and information on the machining process of the whole gripping system (gripper, holder, arrow). The results after the production are tested, analyzed and discussed.

Paper Details

Date Published: 21 November 2001
PDF: 11 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448963
Show Author Affiliations
Dragan Petrovic, Vienna Univ. of Technology (Austria)
Gordana Popovic, Vienna Univ. of Technology (Austria)
Elias Chatzitheodoridis, Vienna Univ. of Technology (Austria)
Oscar Del Medico, INOCON Technologie GmbH (Austria)
Ana Almansa, Vienna Univ. of Technology (Austria)
Franz Suemecz, Vienna Univ. of Technology (Austria)
Peter Herbst, Vienna Univ. of Technology (Austria)
Werner Brenner, Vienna Univ. of Technology (Austria)
Helmut Detter, Vienna Univ. of Technology (Austria)
Roland Duffait, Ctr. de Transfert des Microtechniques (France)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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