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Proceedings Paper

Damping caused by the gas flow in the holes of perforated structures
Author(s): Heng Yang; Minhang Bao; Lukasz Pakula; Patrick J. French
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Paper Abstract

This paper investigates the effect of gas flow in holes on the squeeze film damping of perforated structures. An infinite perforated plate with circular holes is analyzed with an analytical model. The results show that there is a minimum damping ratio for a certain size ratio. The corresponding hole size can be defined as a critical size. When the hole size is smaller than the critical size, the hole effect dominates. The damping ratio increases drastically with hole size decreasing when the size ratio keeps constant. Some finite two-dimensional structures are analyzed with an equivalent circuit model. Similar results are obtained. The finite two-dimensional structures and some quasi three-dimensional structures are also simulated with ANSYS/FLOTRAN. The results are presented.

Paper Details

Date Published: 19 November 2001
PDF: 7 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448862
Show Author Affiliations
Heng Yang, Delft Univ. of Technology (Netherlands)
Minhang Bao, Fudan Univ. (China)
Lukasz Pakula, Delft Univ. of Technology (Netherlands)
Patrick J. French, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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