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Proceedings Paper

Electrical analogies applied on a volumetric micropump: highlights of its fluidic resonant frequency
Author(s): Olivier Francais; Samir Bendib
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Paper Abstract

This paper deals with a simple way for optimising the design of a valve-less micropump. The method is based on electric analogies. The micropump is compared to an electrical circuit similar to a RLC circuit. By this way, the fluidic resonant frequency of the micropump can be evaluated despite a non-linear working due to the used of micro-valve. The results are applied on the design of an electrostatic micropump with a specific electrode shape in order to control the micropump resonant frequency. In order to validate the modelling, a prototype of electrostatic micropump is realised. The micropump is composed of three different wafers associated by bonding techniques.

Paper Details

Date Published: 19 November 2001
PDF: 7 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448860
Show Author Affiliations
Olivier Francais, Ecole Superieure d'Ingenieurs en Electronique et Electrotechnique (France)
Samir Bendib, Ecole Superieure d'Ingenieurs en Electronique et Electrotechnique (France)


Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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