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Proceedings Paper

Modeling of electromechanical forces in electrostatic microrelay with elastically deformed anchor
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov; Alexander Khodin
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Paper Abstract

Electrostatic micro-relays with elastically deformed anchor (ESRE) enable to lower operation voltage due to more efficient use of electrostatic and mechanical forces interaction peculiarities. It contains the anchor with movable electrode of plate shape fixed between elastic cantilever holders with force exceeding a critical one. According to stability theory, the sagged anchor gains sinusoid-like shape with a sag equal to inter-electrode gap and directed out of immovable electrode plane. The performed calculations of ESRE have given detailed information in numerical and graphical form on interaction of electrostatic forces and mechanical forces during the switch-on process of micro-relays with various technical parameters.

Paper Details

Date Published: 19 November 2001
PDF: 8 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448856
Show Author Affiliations
Georgy I. Efremov, Institute of Electronics (Belarus)
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)
Alexander Khodin, Institute of Electronics (Belarus)


Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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