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Proceedings Paper

Force-deflection behavior of piezoelectric actuators
Author(s): Ashok K. Singh; Pawan Nagpal
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Paper Abstract

In the present endeavour, force - deflection behavior of various piezoelectric actuator configurations has been analyzed for performance comparison. The response of stack actuator has been simulated using MATLAB Simulink, in a stack actuator-pendulum configuration. During simulation, stack actuator has been used in charge control feedback mode, because of the advantage of low hysteresis, and high linearity. The model incorporates three compensation blocks, viz 1) a PID position controller, 2) a PI piezoelectric current controller, and 3) a dynamic force feedback. A typical stack actuator, having 130 layers, 1.20x10-4 m thickness, 3.46x10-5m2 cross sectional area, of PZT-5H type, has been utilized for simulation. The response of the system has been tested by applying a sinusoidal input of frequency 500 Hz, and waveform amplitude of 1x10-3V.

Paper Details

Date Published: 19 November 2001
PDF: 11 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448855
Show Author Affiliations
Ashok K. Singh, Institute of Armament Technology (India)
Pawan Nagpal, Institute of Armament Technology (India)

Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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