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Proceedings Paper

MEMS-based micromirror device for optical add/drop module
Author(s): J.C. Chiou; Yu-Chen Lin; S. D. Wu; Shiuan-Huei Lin
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Paper Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Paper Details

Date Published: 19 November 2001
PDF: 7 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448839
Show Author Affiliations
J.C. Chiou, National Chiao Tung Univ. (Taiwan)
Yu-Chen Lin, National Chiao Tung Univ. (Taiwan)
S. D. Wu, National Science Council (Taiwan)
Shiuan-Huei Lin, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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