Share Email Print
cover

Proceedings Paper

MEMS-based micromirror device for optical add/drop module
Author(s): J.C. Chiou; Yu-Chen Lin; S. D. Wu; Shiuan-Huei Lin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Paper Details

Date Published: 19 November 2001
PDF: 7 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448839
Show Author Affiliations
J.C. Chiou, National Chiao Tung Univ. (Taiwan)
Yu-Chen Lin, National Chiao Tung Univ. (Taiwan)
S. D. Wu, National Science Council (Taiwan)
Shiuan-Huei Lin, National Chiao Tung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

© SPIE. Terms of Use
Back to Top