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Proceedings Paper

MEMS cantilever beam electrostatic pull-in model
Author(s): Gary O'Brien; David J. Monk; Liwei Lin
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Paper Abstract

Two closed form algebraic models describing electrostatic latch and release of micro cantilever beams are presented. The 1st model is based on beam theory with a fixed moment at the boundary to represent the electrostatic force and it predicts that electrostatic pull-in occurs at a beam tip displacement of 46% the initial actuator gap. The 2nd model uses a rigid beam pinned at the anchor with a spring equivalent to the beam's mechanical restoring force attached to the tip and describes electrostatic pull-in occurring at a beam tip deflection of 44% the initial actuator gap. Pull-in voltage measurements of polysilicon cantilever beam arrays (6mm wide, 2mm thick, 160 mm long) correlate to both the 1st and 2nd presented models with errors of 8.2% ((sigma) equals1.3%), and 4.9% ((sigma) equals1.4%), respectively. The 1st and 2nd models were observed to improve pull-in voltage prediction by at least 10.3% and 13.7% respectively when compared to previously presented models without the use of empirical correction factors.

Paper Details

Date Published: 19 November 2001
PDF: 11 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448834
Show Author Affiliations
Gary O'Brien, Univ. of Michigan (United States)
David J. Monk, Motorola (United States)
Liwei Lin, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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