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Proceedings Paper

Evaluation of crystal lattice imperfections using reflection x-ray microscope
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Paper Abstract

A novel experimental method is presented for evaluating the crystal lattice imperfections using a reflection X-ray microscope (RXM). An X-ray microscope using an X-ray refractive lens is constructed on the reflected beam axis of the crystal. This method has a unique advantage that the image contrast due to the integral reflectivity variation and due to the phase-contrast of the crystal surface are easily discriminated by de-focusing technique. The sample crystals chosen were silicon circular Bragg Fresnel zone places (BFZPs). The BFZPs had circular zones on Si(111) plane with two different groove depths of 3.9 micrometers and 5.9 micrometers . The validity of the de-focusing method was proved and a clear difference of the X-ray microscope images was observed for the BFZPs with different groove depth.

Paper Details

Date Published: 14 November 2001
PDF: 7 pages
Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); doi: 10.1117/12.448482
Show Author Affiliations
Yoshiki Kohmura, SPring-8/RIKEN---The Institute of Physical and Chemical Research (Japan)
Yoshio Suzuki, SPring-8/RIKEN---The Institute of Physical and Chemical Research (Japan)
Tetsuya Ishikawa, SPring-8/RIKEN---The Institute of Physical and Chemical Research (Japan)
Yury Ivanivich Dudchik, Institute of Applied Physics Problems (Belarus)
Nikolai N. Kolchevsky, Institute of Applied Physics Problems (Belarus)
Fadei F. Komarov, Institute of Applied Physics Problems (Belarus)


Published in SPIE Proceedings Vol. 4501:
X-Ray Mirrors, Crystals, and Multilayers
Andreas K. Freund; Tetsuya Ishikawa; Ali M. Khounsary, Editor(s)

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