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Proceedings Paper

Highly accurate pattern generation using acousto-optical deflection
Author(s): Torbjoern Sandstrom; James K. Tison
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Paper Abstract

A laser reticle writer for 5X reticle production using acousto-optical deflection, Micronic LRS-18, is described and discussed. Polygon scanners have higher ultimate through-put, but an acousto-optical scanner is faster at short scans. Using a short scan simplifies the optics and reduces stripe butting errors. Sub-pixel addressing is done in a single pass with no loss of writing speed. The stage has a fast return stroke and vibration-free movement. The beam position is updated at the start of every scan cycle, i.e., every 20 microsecond(s) , by inertia-free servos, and the influence of mechanical vibrations is highly suppressed. A quartz plate with a known pattern is used for calibration. Laser scanners for R&D and large-area masks are in development.

Paper Details

Date Published: 1 July 1991
PDF: 9 pages
Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); doi: 10.1117/12.44829
Show Author Affiliations
Torbjoern Sandstrom, Micronic Laser Systems AB (Sweden)
James K. Tison, Quantronix Corp. (United States)

Published in SPIE Proceedings Vol. 1463:
Optical/Laser Microlithography IV
Victor Pol, Editor(s)

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