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Proceedings Paper

Design, characterization, and applications of multilayer micro-optics
Author(s): Ruediger Grunwald; Stefan Nerreter; Uwe Griebner; Hans-Joachim Kuehn
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Paper Abstract

Multilayer micro-optics combines refractive beam shaping with wavelength selective multiple interference. Layer composition and thickness distribution were optimized by advanced simulation software. Components were fabricated by mask-shaded vapor deposition with planetary rotation. Surface profiles were characterized interferometrically. For two-dimensional reflectance mapping, a high-accuracy automated system was developed. Micro-mirror arrays for self-imaging resonators, mode selective mirrors for miniaturized solid-state lasers and angular-adapted graded AR-coatings for microlenses are presented as applications.

Paper Details

Date Published: 13 November 2001
PDF: 10 pages
Proc. SPIE 4437, Gradient Index, Miniature, and Diffractive Optical Systems II, (13 November 2001); doi: 10.1117/12.448158
Show Author Affiliations
Ruediger Grunwald, Max-Born-Institute for Nonlinear Optics and Short-Pulse Spectroscopy (Germany)
Stefan Nerreter, Max-Born-Institute for Nonlinear Optics and Short-Pulse Spectroscopy (Germany)
Uwe Griebner, Max-Born-Institute for Nonlinear Optics and Short-Pulse Spectroscopy (Germany)
Hans-Joachim Kuehn, Quarterwave GmbH (Germany)


Published in SPIE Proceedings Vol. 4437:
Gradient Index, Miniature, and Diffractive Optical Systems II
Thomas J. Suleski, Editor(s)

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