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Proceedings Paper

Double-sided hybrid micro-optical elements combining functions of multistage optical systems
Author(s): Uwe D. Zeitner; Peter Dannberg
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Paper Abstract

By using modern wave optical design methods elements and systems with complex optical functions, such as beam shapers or phase correctors can be calculated. Often the positioning of the optical elements to each other and to the optical beam axis is extremely critical and requires a considerable effort during assembly. We demonstrate two fabrication methods suitable for the high precision wafer- scale realization of complex microoptical systems comprising different optical functions. These methods are the combination of different optical functions by a special laser lithographic writing technique on reflow lenses and a double sided UV-replication technique. The method is demonstrated by an example system consisting of a single- mode fiber collimation, a beam shaping and a phase correction function.

Paper Details

Date Published: 9 November 2001
PDF: 7 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448057
Show Author Affiliations
Uwe D. Zeitner, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Peter Dannberg, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)


Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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