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Proceedings Paper

Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence
Author(s): Olivier M. Parriaux; Y. Jourlin; Florent Pigeon; G. Bouchet; Paul W.L. Van Dijk; Rudy J. M. Pellens; Suat Topcu; Yasser Alayli; Marc Bonis
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Paper Abstract

The spatial coherence of optical gratings fabricated by means of a step & repeat camera is characterized by a diffractive interferometric displacement sensor using the grating under test as the grating scale. The displacement sensor head comprises two readout gratings at a definite distance from each other which allows the determination of the local deviation of the grating period with a resolution of 0.001 nanometer.

Paper Details

Date Published: 9 November 2001
PDF: 8 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448042
Show Author Affiliations
Olivier M. Parriaux, Univ. Jean Monnet de St-Etienne (France)
Y. Jourlin, Univ. Jean Monnet de St-Etienne (France)
Florent Pigeon, Univ. Jean Monnet de St-Etienne (France)
G. Bouchet, Univ. Jean Monnet de St-Etienne (France)
Paul W.L. Van Dijk, ASML (Netherlands)
Rudy J. M. Pellens, ASML (Netherlands)
Suat Topcu, Univ. de Technologie Compiegne (France)
Yasser Alayli, Univ. de Technologie Compiegne (France)
Marc Bonis, Univ. de Technologie Compiegne (France)


Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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