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Proceedings Paper

Subwavelength structure and diffractive optics for optical components in the Joint Research Project for Regional Intensive in Osaka Prefecture
Author(s): Hiroshi Toyota; W. Yu; Masato Okano; Shigeto Omori; Tsutomu Yotsuya; Hisao Kikuta; Yoshiki Ichioka
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Paper Details

Date Published: 9 November 2001
PDF: 9 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448039
Show Author Affiliations
Hiroshi Toyota, Osaka Science and Technology Ctr. (Japan)
W. Yu, Osaka Science and Technology Ctr. (Japan)
Masato Okano, Osaka Science and Technology Ctr. (Japan)
Shigeto Omori, Osaka Science and Technology Ctr. (Japan)
Tsutomu Yotsuya, Osaka Science and Technology Ctr. (Japan)
Hisao Kikuta, Osaka Prefecture Univ. (Japan)
Yoshiki Ichioka, Nara National College of Technology (Japan)


Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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