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Proceedings Paper

Fabrication of glass lenses by melting technology
Author(s): Ernst-Bernhard Kley; Hans-Joerg Fuchs; Arnd Kilian
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Paper Abstract

The paper shows a fabrication technology for glass micro lenses. It starts with the fabrication of a boron phosphorus silicate glass (BPSG) layer on a quartz substrate. Pre-forms of BPSG are fabricated using photolithography and dry etching. After that, temper process at a temperature in between the melting temperature of each material changes the surface to the minimal surface. Spherical, cylindrical and even ball lenses are profiles which can be realized. Spherical, cylindrical, and ball lens profiles that can be produced.

Paper Details

Date Published: 9 November 2001
PDF: 8 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448027
Show Author Affiliations
Ernst-Bernhard Kley, Friedrich-Schiller-Univ. Jena (Germany)
Hans-Joerg Fuchs, Friedrich-Schiller-Univ. Jena (Germany)
Arnd Kilian, AIFOtec AG (Germany)


Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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