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Proceedings Paper

Fabrication of gray-scale masks and diffractive optical elements with LDW glass
Author(s): Victor Pavlovich Korolkov; Anatoly I. Malyshev; Alexander G. Poleshchuk; Vadim V. Cherkashin; Hans J. Tiziani; Christof Pruss; Thomas Schoder; Johann Westhauser; Chuck Wu
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Paper Abstract

In the last years the application of gray-scale masks (GSM) for diffractive optics manufacturing attracts attention because of cost-effective possibility to produce a lot of diffractive elements on hard and heat-resistant thermally stable substrates. Direct laser writing of GSMs and fabrication of diffractive optical elements are effectively realized with application of LDW-glass (material for Laser Direct Write from CANYON MATERIALS, Inc). An important advantage of this material is the real-time change of transmittance in a single-step process without liquid development. It is shown that optimal transmittance range in which track width is not more than 1 micrometers is from 5-10% (transmittance of unexposed area) to 60-65% for LDW-glass type I having thinner colored layer. Power modulation and surroundings dependent peculiarities of direct laser writing on LDW-glass are discussed. Results of fabrication of diffractive optical elements using LDW-glass masks are presented. Among several types of LDW glasses studied the advantages of new GS-11 glass are elaborated. Application of GS-11 glass for GSMs allowed to fabricate blazed diffractive structures with backward slope width of 0.8 micrometers .

Paper Details

Date Published: 9 November 2001
PDF: 12 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448026
Show Author Affiliations
Victor Pavlovich Korolkov, Institute of Automation and Electrometry (Russia)
Anatoly I. Malyshev, Institute of Automation and Electrometry (Russia)
Alexander G. Poleshchuk, Institute of Automation and Electrometry (Russia)
Vadim V. Cherkashin, Institute of Automation and Electrometry (Russia)
Hans J. Tiziani, Univ. Stuttgart (Germany)
Christof Pruss, Univ. Stuttgart (Germany)
Thomas Schoder, Univ. Stuttgart (Germany)
Johann Westhauser, Univ. Stuttgart (Germany)
Chuck Wu, Canyon Materials, Inc. (United States)


Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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