Share Email Print

Proceedings Paper

Origins of asymmetry in spin-cast films over topography
Author(s): Loni M. Manske; David B. Graves
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A pulsed laser, a microscope, and a 35-mm camera are used to stroboscopically create and image interference fringes around surface features during spin coating. The measured film thickness profiles are compared to predictions from a lubrication model. This model has been extended to two dimensions so that the surface contours around features of any width and length may be calculated, and preliminary results are reported. Profile asymmetry, or 'pile- up,' is caused by surface tension forces near the edges of the feature that accelerate flow where the channel (the film thickness) narrows and retard flow where the film thickness widens.

Paper Details

Date Published: 1 July 1991
PDF: 9 pages
Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); doi: 10.1117/12.44800
Show Author Affiliations
Loni M. Manske, Univ. of California/Berkeley (United States)
David B. Graves, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 1463:
Optical/Laser Microlithography IV
Victor Pol, Editor(s)

© SPIE. Terms of Use
Back to Top