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Proceedings Paper

Electron-beam direct-write polymeric optical waveguides
Author(s): Wing Han Wong; Edwin Y. B. Pun
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Paper Abstract

Polymeric single mode optical waveguides based on a new kind of negative tone epoxy novolak resin (ENR) polymer have been fabricated using electron beam direct writing. This polymer has a high refractive index, high sensitivity and high glass transition temperature (Tg). Contrast curves and saturation dosages of the polymer on different substrate materials were obtained, and the sensitivity of ENR is found to be over a hundred times larger than that of Polymethyl-methacrylate (PMMA). For single mode channel waveguides with upper claddings, the propagation losses measured were 0.22 dB/cm and 0.48 dB/cm at 1330 nm and 1550 nm for TM mode, and 0.9 dB/cm and 1.2 dB/cm for TE mode, respectively.

Paper Details

Date Published: 6 November 2001
PDF: 6 pages
Proc. SPIE 4453, Materials and Devices for Photonic Circuits II, (6 November 2001); doi: 10.1117/12.447639
Show Author Affiliations
Wing Han Wong, City Univ. of Hong Kong (Hong Kong)
Edwin Y. B. Pun, City Univ. of Hong Kong (Hong Kong)

Published in SPIE Proceedings Vol. 4453:
Materials and Devices for Photonic Circuits II
Mario Nicola Armenise, Editor(s)

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