Share Email Print
cover

Proceedings Paper

Wavefront sensing of a rear-surface reflection through a transparent media suppressing multiple-beam interference effect
Author(s): Kenichi Hibino; Toshiyuki Takatsuji; Sonko Osawa; Tomizo Kurosawa
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Non-destructive profiling of the front and rear surfaces of a transparent media by optical interferometry is described. Interferometric measurement of a transparent parallel media leads to problems of multiple-beam interference noise between the two surfaces. A wavelength scanning interferometer with new sampling functions can determine both surface shapes simultaneously suppressing internal reflection noises less than order of R2(lambda) where R is the reflection index of the media and (lambda) is the source wavelength.

Paper Details

Date Published: 30 October 2001
PDF: 8 pages
Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); doi: 10.1117/12.447367
Show Author Affiliations
Kenichi Hibino, National Institute of Advanced Industrial Science and Technology (Japan)
Toshiyuki Takatsuji, National Institute of Advanced Industrial Science and Technology (Japan)
Sonko Osawa, National Institute of Advanced Industrial Science and Technology (Japan)
Tomizo Kurosawa, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4596:
Advanced Photonic Sensors and Applications II

© SPIE. Terms of Use
Back to Top