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Proceedings Paper

High-resolution micro-moire methods: principles and applications
Author(s): Anand Krishna Asundi; Huimin Xie; Chai Gin Boay
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Paper Abstract

In this paper, the electron beam moire method and AFM scanning moire method are proposed to measure in-plane deformation in micro-scale. The measurement principle and techniques of these two methods are discussed in detail. Additionally, the phase shifting AFM moire method is advanced. The methods are used to measure the thermal deformation in the BGA and QFP electronic packages. The successful results verify the electron beam moire and AFM moire methods are effective tools for measuring micro-scale deformation.

Paper Details

Date Published: 30 October 2001
PDF: 11 pages
Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); doi: 10.1117/12.447352
Show Author Affiliations
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Huimin Xie, Nanyang Technological Univ. (Singapore)
Chai Gin Boay, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4596:
Advanced Photonic Sensors and Applications II

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