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Proceedings Paper

Multichannel 3D profilometry
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Paper Abstract

With the increasing demand for micro-products and bioengineering research, resolutions of profiles with micrometer or even nanometer scale are becoming commonplace. In addition development of large integrated manufacturing systems and the real time life science growth and adaptation need high-speed display and real-time inspection. Single point measurement is time consuming method with large area profile and micrometer resolution. Thus there is a need for a fast 3-D measurement system with high resolution. This paper presents a short overview among optical 3-D shape measurement techniques, and concentrates on the confocal method. Based on the properties analysis, a novel multi-channel 3-D topography measurement system was proposed. The feasibility and the construction of system were described A unique new structure of fiber coupled confocal system is put forth to solve present problems confronted in confocal system. This system can meet the current demand of high resolution and fast 3-D measurement.

Paper Details

Date Published: 30 October 2001
PDF: 7 pages
Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); doi: 10.1117/12.447340
Show Author Affiliations
Chongxiang Li, Nanyang Technological Univ. (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Zhong Ping Fang, Gintic Institute of Manufacturing Technology (Singapore)

Published in SPIE Proceedings Vol. 4596:
Advanced Photonic Sensors and Applications II

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