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Proceedings Paper

Full-field surface measurement technique for optical metrology applications
Author(s): Kuek Hong Wee; Ping Shum; Tian Cher Chye; Lai Wenn Jing
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Paper Abstract

The Shape of an object can be determined by analyzing the distortion of optical grating projected onto it. Many available approaches could be used for this kind of analysis, however most of them require massive computation such as Fourier transformation. Alternatively, direct image processing could be used to give an efficient and accurate result. The profile of the object can be expressed in terms of wire-frame or texture mapped model.

Paper Details

Date Published: 29 October 2001
PDF: 6 pages
Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); doi: 10.1117/12.446619
Show Author Affiliations
Kuek Hong Wee, Nanyang Technological Univ. (Singapore)
Ping Shum, Nanyang Technological Univ. (Singapore)
Tian Cher Chye, Nanyang Technological Univ. (Singapore)
Lai Wenn Jing, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4595:
Photonic Systems and Applications

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