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Proceedings Paper

Microstructuring irradiated by 197- and 308-nm excimer lasers
Author(s): Qihong Lou; Lin Zhang
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Paper Abstract

In this paper, a fast process of fabrication of diffractive optical elements by excimer laser ablation of polymer films is mainly described. Dammann grating on PI and PC materials with feature size of 2 micrometers are successfully fabricated.

Paper Details

Date Published: 29 October 2001
PDF: 4 pages
Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); doi: 10.1117/12.446604
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Lin Zhang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4595:
Photonic Systems and Applications
Yakov S. Sidorin; Ding Yuan Tang, Editor(s)

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