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Proceedings Paper

Research on the scanning system of fiber optic confocal microscope
Author(s): Xinglong Wang; Zeying Chi; Wenjian Chen; Shuaia Wu
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Paper Abstract

Using dual-galvanometer optical scanning head as the reflecting type optic-fiber confocal scanning microscope's planar scanning outfit can achieve the fast scanning to plane image, but there are distortion and vignetting. In the paper, the basic principle of reflecting type fiber-optical confocal scanning microscope is described briefly. The distortion caused by using the common eyepiece as scanning lens, the inherent distortion and vignetting for pre-eyepiece dual galvanometer scanning system have been analyzed in theory, and the according high-speed scanning electronic control system that has the function of distortion correction and image processing has been discussed.

Paper Details

Date Published: 16 October 2001
PDF: 6 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445744
Show Author Affiliations
Xinglong Wang, Nanjing Univ. of Science and Technology (China)
Zeying Chi, Nanjing Univ. of Science and Technology (China)
Wenjian Chen, Nanjing Univ. of Science and Technology (China)
Shuaia Wu, Nanjing Univ. of Science and Technology (United States)


Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications

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