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Proceedings Paper

Spatial distribution of atomic hydrogen in diamond deposition
Author(s): Lifang Dong; Yuhong Zhang
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Paper Abstract

In this paper, we studied the spatial distribution of atomic hydrogen in diamond deposition. The number of hydrogen dissociation as a function of the ratio of electric field to gas pressure is given. And the number of hydrogen dissociation as a function of distance from the hot filament is also given here. These results are of great importance to the study of diamond deposited by EACVD.

Paper Details

Date Published: 16 October 2001
PDF: 4 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445719
Show Author Affiliations
Lifang Dong, Hebei Univ. (China)
Yuhong Zhang, Hebei Univ. (China)


Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications

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