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Proceedings Paper

Photodiodes of CVD diamond films
Author(s): Wanlu Wang; Kejun Liao; Chunyang Kong; L. Fang
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Paper Abstract

The diamond-based photodetectors were investigated. The diamond films were synthesized by microwave plasma assisted chemical vapor deposition. The films were characterized by scanning electron microscopy and Raman spectroscopy etc. The photodiode structures were fabricated on the free standing diamond films. The experimental results showed that the devices exhibited a strong UV photoresponse. It was found that the structures of the diamond films have a significant effect on the performance of the devices. The photoconductive gain of heteroepitaxial diamond films was greater than that of polycrystalline diamond films.

Paper Details

Date Published: 16 October 2001
PDF: 6 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445703
Show Author Affiliations
Wanlu Wang, Chongqing Univ. (China)
Kejun Liao, Chongqing Univ. (China)
Chunyang Kong, Chongqing Univ. (China)
L. Fang, Chongqing Univ. (China)

Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications
David Chen; David Chen; Guo-Yu Wang; Ray T. Chen; Guo-Yu Wang; Chang-Chang Zhu, Editor(s)

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