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Proceedings Paper

Integrated waveguide turning mirror in SOI
Author(s): Yanzhe Tang; WenHui Wang; Tie Li; Yuelin Wang
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Paper Abstract

Planar lightwave circuits based on silicon are playing important roles in integrated optical systems. Integrated waveguide turning mirror (IWTM) is essential component for the compactness of optical devices. We design an integrated waveguide turning mirror with a 90 degree(s) directional change in SOI, which diminishes the primary loss from the displacement of waveguide and mirror and has very low mirror surface roughness. In this paper, the theory, design and fabrication of this IWTM are introduced. A beam splitter using the structure is fabricated to test the performances, and expected results are obtained.

Paper Details

Date Published: 16 October 2001
PDF: 4 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445700
Show Author Affiliations
Yanzhe Tang, Zhejiang Univ. (China)
WenHui Wang, Shanghai Institute of Metallurgy (China)
Tie Li, Shanghai Institute of Metallurgy (China)
Yuelin Wang, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications

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