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Proceedings Paper

Electrostatic driven self-aligned optical switch
Author(s): Tie Li; Ming Xiang; Yuelin Wang
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Paper Abstract

Low-cost optical switch is one of the most important components for fiber-based local area networks. In this paper electrostatic driven self-aligned optical switch was developed for the application in optical networks. A convenient wet etching by KOH solution was used to fabricate the structure in (100) silicon wafer in the optical switch. The cantilever, vertical mirror and V-grooves were formed in the bulk silicon directly, which makes the batch process and assembly simpler and more operable. A displacement of 30 microns of the mirror was achieved by the electrostatic force between the silicon block and the aluminum pad. An obvious advantage of the electrostatic driven way is that the operation has no power consumption. Operating frequency of 200 Hz was accepted as the working frequency, which indicated that the switching time can be less than 5 ms. Coupling alignment demonstrated that the insertion losses can be less than 2 dB in the ON-OFF positions.

Paper Details

Date Published: 16 October 2001
PDF: 5 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445699
Show Author Affiliations
Tie Li, Shanghai Institute of Metallurgy (China)
Ming Xiang, Shanghai Institute of Metallurgy (China)
Yuelin Wang, Shanghai Institute of Metallurgy (China)


Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications

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