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Proceedings Paper

Numerical approximation of thermal conductivity depth distributions by the modulated photoreflectance data
Author(s): Jianxin Zhu
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Paper Abstract

Photoacoustic measurement techniques can be used to determine thermal properties on and below the sample's surface, thus subsurface thermal inhomogeneities, such as continuous distributions of thermal parameters, become measurable by photoacoustic methods. In this paper, a numerical reconstruction treatment of thermal conductivity depth distribution is provided. Some simulation examples show that the method can be used in inverse computation of thermal conductivity by surface modulated photoreflectance signals.

Paper Details

Date Published: 16 October 2001
PDF: 5 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445698
Show Author Affiliations
Jianxin Zhu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications

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