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Proceedings Paper

Quadrature phase interferometer used to calibrate dial indicator calibrators
Author(s): Shau-Chi Huang; Huay-Chung Liou; Gwo-Sheng Peng; Ming-Feng Lu
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Paper Abstract

To calibrate dial indicators, gage blocks or dial indicator calibrators are usually used. For better accuracy and resolution, interferometers are used to calibrate dial indicator calibrators. Systematic errors of laser interferometers can be classified into three categories of intrinsic errors, environment errors and installation errors. Intrinsic errors include laser wavelength error, electronic error and optics nonlinearity. In order to achieve nanometer accuracy, minimizing intrinsic error is crucial. In this paper, we will address the problems of minimizing the optics nonlinearity error and describe the discrete-time signal processing method to minimize the electronic error, nonlinearity error and drift by simply using quadrature phase interferometer for nanometer accuracy and linearity.

Paper Details

Date Published: 22 October 2001
PDF: 8 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445644
Show Author Affiliations
Shau-Chi Huang, Industrial Technology Research Institute (Taiwan)
Huay-Chung Liou, Industrial Technology Research Institute (Taiwan)
Gwo-Sheng Peng, Industrial Technology Research Institute (Taiwan)
Ming-Feng Lu, Ming-Hsing Institute of Technology (Taiwan)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

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