Share Email Print
cover

Proceedings Paper

Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Japanese Ultimate Flatness Interferometer (FUJI) is a Fizeau type flatness interferometer that is capable of measuring flatness over 310 mm diameter. The concept and technologies applied to FUJI are explained. To demonstrate the performance of FUJI, an international comparison was held with Australia, and the difference of two independent measurements were smaller than four nanometers.

Paper Details

Date Published: 22 October 2001
PDF: 8 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445643
Show Author Affiliations
Toshiyuki Takatsuji, National Institute of Advanced Industrial Science and Technology (Japan)
Nobuaki Ueki, Fuji Photo Optical Co., Ltd. (Japan)
Kenichi Hibino, National Institute of Advanced Industrial Science and Technology (Japan)
Sonko Osawa, National Institute of Advanced Industrial Science and Technology (Japan)
Tomizo Kurosawa, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

© SPIE. Terms of Use
Back to Top