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Proceedings Paper

Characterization of inductance probe for gauge block measurement by Fizeau interferometer
Author(s): Kuo-Ming Chang; Gwo-Sheng Peng
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Paper Abstract

Inductance probes are widely used in gauge block comparators. They have to be calibrated by interferometer to fulfill the traceability. To avoid the nonlinearity of interferometer within one interference fringe, a combination of digital and analog servo driving device with integer number of fringe orders of Fizeau interferometer is used to provide the movement for probe calibration. The standard deviation of positioning repeatability of the driving device is about 1 nm. Calibration is performed with double probe arrangement to simulate the actual condition of probes used in gauge block comparators. Typical sensitivity of probes is about 0.3412 V/micrometers with standard deviation of 0.087 percent while nonlinearity is about 9 nm over measuring range of +/- 10 micrometers . A 0.33 percent difference of sensitivity is observed if single probe is arranged in the calibration.

Paper Details

Date Published: 22 October 2001
PDF: 7 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445641
Show Author Affiliations
Kuo-Ming Chang, Industrial Technology Research Institute (Taiwan)
Gwo-Sheng Peng, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

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