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Proceedings Paper

Nonlinear error of common-path laser heterodyne interferometer
Author(s): Huijie Zhao; Guangjun Zhang
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Paper Abstract

The setup of the common-path laser heterodyne interferometer (CLHI) with Wollaston Prism is introduced. The nonlinear error of this CLHI is frequency mixing. The concept of frequency mixing and the general principle of nonlinear error are studied by vector and interference theory. The error sources in the interferometer are the orientation of Wollaston Prism and metal mirror. When the polarization direction of the laser beam is not parallel to the axis of Wollaston prism, frequency mixing occurred in the output light. The vector of interference signal of the system is analyzed and the equation of nonlinear error is given. The law of the error is studied. On the other hand, the metal reflection theory is used to study the eccentricity and orientation error in the reflected light of linear polarized laser from metal mirror. Then the vector theory is used to determine the frequency mixing vector of the two reflected beams. The formula of the interference signal and nonlinear error are concluded. The simulation error is presented. Finally, the error compensation methods are discussed. The results of the research show that it is of great importance to improve the accuracy of heterodyne interferometer.

Paper Details

Date Published: 22 October 2001
PDF: 8 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445635
Show Author Affiliations
Huijie Zhao, Beijing Univ. of Aeronautics and Astronautics (China)
Guangjun Zhang, Beijing Univ. of Aeronautics and Astronautics (China)


Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

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