Share Email Print

Proceedings Paper

Improved calibration of an interference microscope
Author(s): Richard Koops
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The calibration of our interference microscope is currently performed by an elaborate multi step process. As a result the total uncertainty of a measurement performed with the interference microscope is much larger than the intrinsic repeatability of the microscope which is of the order of 1 nm. A major contribution to the total uncertainty is a length dependent factor, resulting from a calibration step using gauge blocks that finally yields 8 nm uncertainty for a step height of 2 micrometers . In order to reduce the total uncertainty we propose a novel step-height standard and calibration procedure. The standard is adjustable and can be simultaneously measured with the interference microscope and a laser interferometer allowing calibration of the entire dynamic range of the microscope with a single artefact. The new calibration method eliminates the process that contributes most to the total uncertainty budget in the current procedure. A possible implementation of the step-height standard is presented.

Paper Details

Date Published: 22 October 2001
PDF: 7 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445634
Show Author Affiliations
Richard Koops, NMi-Institute for Metrology and Technology (Netherlands)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

© SPIE. Terms of Use
Back to Top