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Proceedings Paper

Absolute measurement of planarity: pixel versus Zernike data analysis
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Paper Abstract

Relating two different methods of data analysis for assessing the absolute planarity of reference flats is reported. Considered methods are based on Zernike representation and pixel handling, respectively. Operations to be implemented on interferometric systems to use the same data set for comparative processing are described.

Paper Details

Date Published: 22 October 2001
PDF: 4 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445632
Show Author Affiliations
Vincenzo Greco, Istituto Nazionale di Ottica Applicata (Italy)
Giuseppe Molesini, Istituto Nazionale di Ottica Applicata (Italy)


Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

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