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Proceedings Paper

Adaptive interferometric metrology system (AIMS) based on an interferometer employing a "common-path" optical configuration
Author(s): Michael J. Downs
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Paper Details

Date Published: 22 October 2001
PDF: 7 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445612
Show Author Affiliations
Michael J. Downs, Interferomet, Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements

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