Share Email Print

Proceedings Paper

Automatic gauge block measurement by phase stepping interferometry with three laser wavelengths
Author(s): Gerhard Boensch
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An evaluation system for automatic measurements of short gauge blocks by interferometry is described. The system is based on a commercially available Twyman-Green interferometer which has been modified so that phase stepping interferometry can be applied. Three stabilized lasers are used to determine the gauge block length by the method of exact fractions. The data of the evaluated interference phase have to be processed to enable automatic identification of the gauge block's measuring face in the interference pattern and to determine characteristic quantities of the gauge block under test. The uncertainty contribution of the interference evaluation for the central length is approximately 1,5 nm which is sufficiently small compared with other uncertainty contributions of the measurement process.

Paper Details

Date Published: 22 October 2001
PDF: 10 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445608
Show Author Affiliations
Gerhard Boensch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements
Jennifer E. Decker; Nicholas Brown, Editor(s)

© SPIE. Terms of Use
Back to Top