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Proceedings Paper

Microfabricated ZnSe diffractive optical elements for CO2 laser
Author(s): Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba
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Paper Abstract

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE for high power CO2 lasers. The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE. We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.

Paper Details

Date Published: 23 October 2001
PDF: 8 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445598
Show Author Affiliations
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Kenichi Kurisu, Sumitomo Electric Industries, Ltd. (Japan)
Takeshi Okada, Sumitomo Electric Industries, Ltd. (Japan)
Takayuki Hirai, Sumitomo Electric Industries, Ltd. (Japan)
Hirokuni Nanba, Sumitomo Electric Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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