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Proceedings Paper

New measurement system for microscopic formtesting of microstructures by means of multiple-wavelength interferometry
Author(s): Karsten Schneefuss; Tilo Pfeifer
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Paper Abstract

Nowadays large area microstructured surfaces can be produced by innovative production technologies. The task for the measurement technologies is to cover the process chain during the production of these 3D-nano- and microstructures. At the Fraunhofer IPT the form of the structures is investigated because it determines the functionality of the components most significantly. Fast interferometrical measurement concepts are developed for the inspection of the surface. The possibilities of interferometrical formtesting of prisms, spherical lens arrays or gratings are adapted to the microscopic range. Especially for the characterization of gratings, the measurement range has been extended by using multiple wavelength interferometry.

Paper Details

Date Published: 23 October 2001
PDF: 8 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445597
Show Author Affiliations
Karsten Schneefuss, Fraunhofer Institute of Production Technology (Germany)
Tilo Pfeifer, Fraunhofer Institute of Production Technology (Germany)


Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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