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Proceedings Paper

Waveguide microinterferometry system for microelements investigation
Author(s): Leszek A. Salbut; Michal Jozwik; Christophe Gorecki; Seung Seoup Lee
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Paper Abstract

In this paper the measurement concept based on full-field optical methods is presented. In order to fulfil most of the requirements connected with advanced micro element and micro material testing a waveguide micro interferometer based on grating interferometry method is proposed and described in details. The modification of this system for 3D-displacement measurements is presented. The applicability of the micro interferometer is shown at the examples of silicon beam and micro membranes testing.

Paper Details

Date Published: 23 October 2001
PDF: 6 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445596
Show Author Affiliations
Leszek A. Salbut, Warsaw Univ. of Technology (Poland)
Michal Jozwik, Warsaw Univ. of Technology (France)
Christophe Gorecki, CNRS-Univ. de Franche-Comte (France)
Seung Seoup Lee, CNRS-Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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