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Proceedings Paper

Optical measurement methods to study dynamic behavior in MEMS
Author(s): Christian Rembe; Rishi Kant; Richard S. Muller
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Paper Abstract

The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.

Paper Details

Date Published: 23 October 2001
PDF: 11 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445595
Show Author Affiliations
Christian Rembe, Univ. of California/Berkeley (Germany)
Rishi Kant, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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