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Proceedings Paper

Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis
Author(s): Patrice Minotti
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Paper Abstract

Industrialization of MEMS devices such as silicon-based sensors and actuators requires specific tools to verify that their mechanical properties and/or motions obey the designer's's intent. Accordingly, this paper investigates new on-chip laboratories that will allow systematic mechanical analysis of MEMS-based structures and materials.

Paper Details

Date Published: 23 October 2001
PDF: 12 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445594
Show Author Affiliations
Patrice Minotti, CNRS-Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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