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Proceedings Paper

Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors
Author(s): Christophe Gorecki; Sabry Khalfallah
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Paper Abstract

We propose to fabricate GaAlAs/GaAs multi-layer microtips for scanning near-field optical microscopy (SNOM) using the anisotropic etching. The etching was performed in a solution of H3PO4:H2O2:H2O, operating at the temperature of 10 degrees C. We obtained the pyramid-shaped microtips with four etched facets and with a radius of curvature at the apex lower than 50 nm.

Paper Details

Date Published: 23 October 2001
PDF: 4 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445593
Show Author Affiliations
Christophe Gorecki, CNRS-Univ. de Franche-Comte (France)
Sabry Khalfallah, CNRS-Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection
Christophe Gorecki; Werner P. O. Jueptner; Malgorzata Kujawinska, Editor(s)

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