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Proceedings Paper

Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor
Author(s): Pascal Vairac; Rodrigue Rousier; Raphail Patois; Bernard Cretin
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Paper Abstract

Optical measuring techniques in MEMS are attractive ways of detection and reproducible methods. Applications of appropriate optical measuring techniques can be found in many situations: local study of materials constants, characterization of micromechanical systems, vibration analysis, and environmental behavior.

Paper Details

Date Published: 23 October 2001
PDF: 12 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445591
Show Author Affiliations
Pascal Vairac, Lab. de Physique et Metrologie des Oscillateurs du CNRS (France)
Rodrigue Rousier, Lab. de Physique et Metrologie des Ocillateurs du CNRS (France)
Raphail Patois, Lab. de Physique et Metrologie des Oscillateurs du CNRS (France)
Bernard Cretin, Lab. de Physique et Metrologie des Oscillateurs du CNRS (France)


Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

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