Share Email Print
cover

Proceedings Paper

Application of digital holography for the inspection of microcomponents
Author(s): Wolfgang Osten; Soenke Seebacher; Werner P. O. Jueptner
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Digital Holography is a modern coherent-optical technique that allows the direct access to the interference phase in holographic interferometry. In contrast to conventional tactical measurement techniques digital holographic interferometry provides full-field access, non-invasivity, high sensitivity and accuracy, high resolution of data points and advanced system performance in order to meet requirements of the underlying numerical or analytical model. The measured interference phase contains the information about the shape of the object under test and/or its deformation after loading. These data can be used to investigate the materials' behavior of microcomponents. In combination with special loading techniques and physical models of the loading behavior of the investigated components some important material parameters such as the Young's modulus, the Poisson ratio and the thermal expansion coefficient of microcomponents can be measured. The paper describes the measuring technology and shows some examples of micro component testing.

Paper Details

Date Published: 23 October 2001
PDF: 15 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445589
Show Author Affiliations
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Soenke Seebacher, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner P. O. Jueptner, Bremer Institut fuer Angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection

© SPIE. Terms of Use
Back to Top