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Proceedings Paper

Application of Ritchey-Common test in large flat measurements
Author(s): Sen Han; Erik Novak; Mike Schurig
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Paper Abstract

The Ritchey-Common test is a well-known method for large flat measurements. This paper describes a straightforward implementation ofthe formulas, to allow accurate surface height calculation using relatively few separate measurements. Both Ritchey-Common test and direct measurement results are presented. In comparison of the two methods, the RitcheyCommon test is in good agreement with the direct measurement.

Paper Details

Date Published: 3 October 2001
PDF: 6 pages
Proc. SPIE 4399, Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering, (3 October 2001); doi: 10.1117/12.445584
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)
Mike Schurig, Veeco Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 4399:
Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering
Roland Hoefling; Werner P. O. Jueptner; Malgorzata Kujawinska, Editor(s)

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