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Proceedings Paper

Application of Ritchey-Common test in large flat measurements
Author(s): Sen Han; Erik Novak; Mike Schurig
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Paper Details

Date Published: 3 October 2001
PDF: 6 pages
Proc. SPIE 4399, Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering, (3 October 2001); doi: 10.1117/12.445584
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)
Mike Schurig, Veeco Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 4399:
Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering

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