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Proceedings Paper

Application of digital holographic microscopy for inspection of micro-optical components
Author(s): Volker Kebbel; Hans-Juergen Hartmann; Werner P. O. Jueptner
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Paper Abstract

Micro-optical components such as microlenses and microlens arrays are of growing interest in the fields of laser beam shaping, optical processing and similar applications. The characterization of these components require a fast and robust measurement technique, especially for simultaneous inspection of lenses manufactured in array structures e.g. on silicon wafers.

Paper Details

Date Published: 23 October 2001
PDF: 10 pages
Proc. SPIE 4398, Optical Measurement Systems for Industrial Inspection II: Application in Industrial Design, (23 October 2001); doi: 10.1117/12.445551
Show Author Affiliations
Volker Kebbel, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Hans-Juergen Hartmann, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner P. O. Jueptner, Bremer Institut fuer Angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 4398:
Optical Measurement Systems for Industrial Inspection II: Application in Industrial Design

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