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Proceedings Paper

Electrostatic flexible film actuators as IR choppers for pyroelectric detectors or microbolometers
Author(s): David Edward Dausch; Scott H. Goodwin-Johansson; Gary McGuire; Leslie D. Kramer; Mark R. Davidson
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Paper Abstract

Flexible film electrostatic MEMS actuators can be used as micromachined IR choppers for pyroelectric and microbolometer sensors. The flexible actuators act as tightly curled shutters, providing transmission of IR radiation to the sensor elements when open and reflection of the IR when closed. These actuators consist of a polymer/metal film stack which is microfabricated and released from a substrate. Thermal and mechanical stress in the film stack causes the actuator to curl when released, and the film can be uncurled by applying an electric field between the curled film and the substrate. Tightly curled actuators in the range of 50 μm to 1 mm square have been fabricated, and arrays have been produced and operated. Operating voltage is in the range of 50 - 300 V with frequencies > 5 kHz. The performance of these actuators is presented, and their applicability to IR choppers is discussed.

Paper Details

Date Published: 10 October 2001
PDF: 8 pages
Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); doi: 10.1117/12.445338
Show Author Affiliations
David Edward Dausch, MCNC (United States)
Scott H. Goodwin-Johansson, MCNC (United States)
Gary McGuire, MCNC (United States)
Leslie D. Kramer, Lockheed Martin Missiles and Fire Control (United States)
Mark R. Davidson, Univ. of Florida (United States)

Published in SPIE Proceedings Vol. 4369:
Infrared Technology and Applications XXVII
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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