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Proceedings Paper

High-resolution pyroelectric linear arrays based on LiTaO3
Author(s): Volkmar Norkus; Gerald Gerlach; Guenter Hofmann
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Paper Abstract

Lithium tantalate (LiTaO3) is a material that is excellently suited for pyroelectric infrared detectors. Its figures of merit are first rate, it has a good long-time stability and it is available at reasonable cost. Researchers at the Institute for Solid State Electronics have been developing a flexible technology to manufacture LiTaO3 detectors for the last twelve years. As a result, devices can be produced that can be optimally adjusted to the planned application. This paper describes the design and basic features of linear arrays with up to 256 responsive elements. The arrays are hybrid devices consisting of the pyroelectric chip and a CMOS multiplexer. It is demonstrated that special patterning technologies (ion beam etching) and optical functional layers on the responsive element considerably increase the thermal and spatial resolution. Thus, NEP values smaller than 0.2 nW were obtained at 40 Hz chopper frequency. Main applications of detectors are the contactless temperature measurement and -- increasingly -- the spectrometry in the wavelength range 0.8 ... 25 μm.

Paper Details

Date Published: 10 October 2001
PDF: 10 pages
Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); doi: 10.1117/12.445300
Show Author Affiliations
Volkmar Norkus, Technische Univ. Dresden and DIAS Angewandte Sensorik GmbH (Germany)
Gerald Gerlach, Technische Univ. Dresden (Germany)
Guenter Hofmann, DIAS Angewandte Sensorik GmbH (Germany)

Published in SPIE Proceedings Vol. 4369:
Infrared Technology and Applications XXVII
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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