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Proceedings Paper

Semiconducting YBaCuO microbolometers for uncooled broadband IR sensing
Author(s): Mahmoud F. Almasri; Zeynep Celik-Butler; Donald P. Butler; Alp Yaradanakul; Ali Yildiz
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Paper Abstract

This paper describes the modeling, design, fabrication and testing of advanced uncooled thermal detectors, based on semiconducting YBaCuO. The aim is to provide NASA with advanced broad-band infrared (IR) detectors to replace the current CERES (Clouds and the Earth's Radiant Energy System) hardware that utilizes three channels, each housing a 1.5 mm X 1.5 mm thermister bolometer with 1 X 4 array of detectors in each of the three channels, thus yielding a total of 12 channels. A double mirror structure is used to obtain uniform spectral response from 0.3-100 μm wavelength. Double absorbers are utilized to further flatten the spectral response and to enhance the absorption of infrared radiation. The devices were fabricated using a polyimide sacrificial layer to achieve thermal isolation of the detector. A low thermal conductivity to the substrate enables the detector to integrate the energy from the incident radiation. An air gap was created by ashing the polyimide sacrificial layer from underneath the thermometer. A passivation layer was used to protect YBaCuO during ashing process and maintain a relatively high temperature coefficient of resistance of around 2.8%. These devices have successfully demonstrated voltage responsivities over 103 V/W, detectivities above 108 cm Hz1/2/W, NEP per root Hertz bandwidth less than 4 X 10-10 W/Hz1/2 and thermal time constant less than 15 ms. Several specific designs were fabricated and tested. Relatively uniform response in the wavelength range of 0.6 to 15 μm was measured.

Paper Details

Date Published: 10 October 2001
PDF: 10 pages
Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); doi: 10.1117/12.445295
Show Author Affiliations
Mahmoud F. Almasri, Southern Methodist Univ. (United States)
Zeynep Celik-Butler, Southern Methodist Univ. (United States)
Donald P. Butler, Southern Methodist Univ. (United States)
Alp Yaradanakul, Southern Methodist Univ. (United States)
Ali Yildiz, Southern Methodist Univ. (United States)

Published in SPIE Proceedings Vol. 4369:
Infrared Technology and Applications XXVII
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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