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Proceedings Paper

Influence of annealing on optical properties of ZnO film
Author(s): Jinzhong Wang; Xinqiang Wang; Xiuying Jiang; Shuren Yang; Dingsan Gao; Guotong Du
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Paper Abstract

No annealed, annealed after growth and annealed during growth ZnO films (denoted s1,s2, and s3 respectively) were grown on C-plane sapphire substrate by plasma-enhanced MOCVD and characterized by XRD and the optical transmission spectra. We could find that there is tensile strain in the c-plane of the films. Furthermore, the tensile strain increases after annealing. At the same time, the optical transmission indicates that the transmission of s2 in visible region is the highest and the value of s3 is the lowest.

Paper Details

Date Published: 19 October 2001
PDF: 4 pages
Proc. SPIE 4580, Optoelectronics, Materials, and Devices for Communications, (19 October 2001); doi: 10.1117/12.444949
Show Author Affiliations
Jinzhong Wang, Jilin Univ. (China)
Xinqiang Wang, Jilin Univ. (China)
Xiuying Jiang, Jilin Univ. (China)
Shuren Yang, Jilin Univ. (China)
Dingsan Gao, Jilin Univ. (China)
Guotong Du, Jilin Univ. (China)


Published in SPIE Proceedings Vol. 4580:
Optoelectronics, Materials, and Devices for Communications
Tien Pei Lee; Qiming Wang, Editor(s)

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